Three-dimensional laser lithography with conceptually diffraction-unlimited lateral and axial resolution

التفاصيل البيبلوغرافية
العنوان: Three-dimensional laser lithography with conceptually diffraction-unlimited lateral and axial resolution
المؤلفون: Fischer, Joachim, Ergin, Tolga, von Freymann, Georg, Wegener, Martin
المصدر: CLEO: 2011 - Laser Science to Photonic Applications Lasers and Electro-Optics (CLEO), 2011 Conference on. :1-2 May, 2011
Relation: 2011 Conference on Lasers and Electro-Optics (CLEO)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781457712234
9781557529107
9781557529114
تدمد:21608989
DOI:10.1364/CLEO_SI.2011.CML1