Electrical performance optimization of a silicon-based EUV photodiode with near-theoretical quantum efficiency

التفاصيل البيبلوغرافية
العنوان: Electrical performance optimization of a silicon-based EUV photodiode with near-theoretical quantum efficiency
المؤلفون: Shi, L., Nanver, L. K., Laubis, C., Scholze, F., Nihtianov, S.
المصدر: 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International. :48-51 Jun, 2011
Relation: TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781457701573
9781457701559
9781457701566
تدمد:2159547X
21641641
DOI:10.1109/TRANSDUCERS.2011.5969130