مؤتمر
Electrical performance optimization of a silicon-based EUV photodiode with near-theoretical quantum efficiency
العنوان: | Electrical performance optimization of a silicon-based EUV photodiode with near-theoretical quantum efficiency |
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المؤلفون: | Shi, L., Nanver, L. K., Laubis, C., Scholze, F., Nihtianov, S. |
المصدر: | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International. :48-51 Jun, 2011 |
Relation: | TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9781457701573 9781457701559 9781457701566 |
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تدمد: | 2159547X 21641641 |
DOI: | 10.1109/TRANSDUCERS.2011.5969130 |