مؤتمر
DMMP vapor detection with 50NM thick AlN films based microcantilevers
العنوان: | DMMP vapor detection with 50NM thick AlN films based microcantilevers |
---|---|
المؤلفون: | Ivaldi, P., Abergel, J., Blanc, H., Colinet, E., Myers, E.B., Roukes, M.L., Robert, P., Andreucci, P., Hentz, S., Defay, E. |
المصدر: | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International. :162-165 Jun, 2011 |
Relation: | TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9781457701573 9781457701559 9781457701566 |
---|---|
تدمد: | 2159547X 21641641 |
DOI: | 10.1109/TRANSDUCERS.2011.5969288 |