مؤتمر
Time predictive model of charge accumulation in bulk PECVD dielectric materials used for electrostatic RF MEMS switches
| العنوان: | Time predictive model of charge accumulation in bulk PECVD dielectric materials used for electrostatic RF MEMS switches |
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| المؤلفون: | Souchon, F., Koszewski, A., Dieppedale, C., Ouisse, T. |
| المصدر: | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International. :2899-2903 Jun, 2011 |
| Relation: | TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781457701573 9781457701559 9781457701566 |
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| تدمد: | 2159547X 21641641 |
| DOI: | 10.1109/TRANSDUCERS.2011.5969565 |