Micro-Opto-Mechanical technology for the fabrication of highly miniaturized fiber-optic ultrasonic detectors

التفاصيل البيبلوغرافية
العنوان: Micro-Opto-Mechanical technology for the fabrication of highly miniaturized fiber-optic ultrasonic detectors
المؤلفون: Belsito, L., Mancarella, F., Ferri, M., Roncaglia, A., Biagi, E., Cerbai, S., Masotti, L., Masetti, G., Speciale, N.
المصدر: 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International. :594-597 Jun, 2011
Relation: TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781457701573
9781457701559
9781457701566
تدمد:2159547X
21641641
DOI:10.1109/TRANSDUCERS.2011.5969725