مؤتمر
Reducing stiction in Microelectromechanical Systems by nanometer-scale films grown by atomic layer deposition
| العنوان: | Reducing stiction in Microelectromechanical Systems by nanometer-scale films grown by atomic layer deposition |
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| المؤلفون: | Puurunen, R.L., Haara, A., Ritala, H., Dekker, J., Kainlauri, M., Pohjonen, H., Suni, T., Kiihamaki, J., Santala, E., Leskela, M., Kattelus, H. |
| المصدر: | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International. :1887-1890 Jun, 2011 |
| Relation: | TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781457701573 9781457701559 9781457701566 |
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| تدمد: | 2159547X 21641641 |
| DOI: | 10.1109/TRANSDUCERS.2011.5969776 |