مؤتمر
Plasma damage failure analysis cases study by EBIC detection on nano-probing SEM system
| العنوان: | Plasma damage failure analysis cases study by EBIC detection on nano-probing SEM system |
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| المؤلفون: | Chiu E Tseng, Wen Pin Lin, Yi Heang Chen |
| المصدر: | 18th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) Physical and Failure Analysis of Integrated Circuits (IPFA), 2011 18th IEEE International Symposium on the. :1-4 Jul, 2011 |
| Relation: | 2011 18th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA 2011) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781457701597 9781457701580 |
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| تدمد: | 19461542 19461550 |
| DOI: | 10.1109/IPFA.2011.5992739 |