Effect on regrowth interface quality of a new treatment, ACE, in a process using hydrocarbon gas RIE to fabricate InP-based BH-LD

التفاصيل البيبلوغرافية
العنوان: Effect on regrowth interface quality of a new treatment, ACE, in a process using hydrocarbon gas RIE to fabricate InP-based BH-LD
المؤلفون: Yamamoto, N., Kishi, K., Kondo, Y., Matsumoto, S., Kadota, Y., Okamoto, I., Mawatari, H., Oohashi, H., Suzaki, Y.
المصدر: Conference Proceedings. 1997 International Conference on Indium Phosphide and Related Materials Indium phosphide and related materials Indium Phosphide and Related Materials, 1997., International Conference on. :614-617 1997
Relation: Conference Proceedings. 1997 International Conference on Indium Phosphide and Related Materials
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780338987
9780780338982
تدمد:10928669
DOI:10.1109/ICIPRM.1997.600242