مؤتمر
Fabrication of a quasistatic-resonant microscanner by implementing a vertical combdrive through wafer assembly actuation
| العنوان: | Fabrication of a quasistatic-resonant microscanner by implementing a vertical combdrive through wafer assembly actuation |
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| المؤلفون: | Kallweit, D., Jung, D., Sandner, T., Schenk, H. |
| المصدر: | 16th International Conference on Optical MEMS and Nanophotonics Optical MEMS and Nanophotonics (OMN), 2011 International Conference on. :147-148 Aug, 2011 |
| Relation: | 2011 International Conference on Optical MEMS & Nanophotonics |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781457703348 9781457703355 9781457703362 |
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| تدمد: | 21605033 21605041 |
| DOI: | 10.1109/OMEMS.2011.6031046 |