AlN-based MEMS devices for vibrational energy harvesting applications

التفاصيل البيبلوغرافية
العنوان: AlN-based MEMS devices for vibrational energy harvesting applications
المؤلفون: Bertacchini, A., Scorcioni, S., Dondi, D., Larcher, L., Pavan, P., Todaro, M. T., Campa, A., Caretto, G., Petroni, S., Passaseo, A., De Vittorio, M.
المصدر: 2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC) Solid-State Device Research Conference (ESSDERC), 2011 Proceedings of the European. :119-122 Sep, 2011
Relation: ESSDERC 2011 - 41st European Solid State Device Research Conference
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781457707063
9781457707070
9781457707087
تدمد:19308876
23786558
DOI:10.1109/ESSDERC.2011.6044220