A current density analysis tool to identify BEOL fails under ESD stress

التفاصيل البيبلوغرافية
العنوان: A current density analysis tool to identify BEOL fails under ESD stress
المؤلفون: Mitra, Souvick, Palmer, Nicholas, Gauthier, Robert, Muhammad, Mujahid, Halbach, Ralph, Seguin, Chris
المصدر: EOS/ESD Symposium Proceedings Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2011 33rd. :1-6 Sep, 2011
Relation: 2011 33rd Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD)
قاعدة البيانات: IEEE Xplore Digital Library