مؤتمر
Comparative study of two types electro-thermally actuated micromirrors on silicon substrate
| العنوان: | Comparative study of two types electro-thermally actuated micromirrors on silicon substrate |
|---|---|
| المؤلفون: | Comanescu, F., Tibeica, C., Purica, M., Schiopu, P. |
| المصدر: | CAS 2011 Proceedings (2011 International Semiconductor Conference) Semiconductor Conference (CAS), 2011 International. 1:91-94 Oct, 2011 |
| Relation: | 2011 International Semiconductor Conference (CAS 2011) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781612841731 9781612841724 |
|---|---|
| تدمد: | 1545827X 23770678 |
| DOI: | 10.1109/SMICND.2011.6095722 |