مؤتمر
Comparative study of two types electro-thermally actuated micromirrors on silicon substrate
العنوان: | Comparative study of two types electro-thermally actuated micromirrors on silicon substrate |
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المؤلفون: | Comanescu, F., Tibeica, C., Purica, M., Schiopu, P. |
المصدر: | CAS 2011 Proceedings (2011 International Semiconductor Conference) Semiconductor Conference (CAS), 2011 International. 1:91-94 Oct, 2011 |
Relation: | 2011 International Semiconductor Conference (CAS 2011) |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9781612841731 9781612841724 |
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تدمد: | 1545827X 23770678 |
DOI: | 10.1109/SMICND.2011.6095722 |