مؤتمر
Comparative study of two types electro-thermally actuated micromirrors on silicon substrate
| العنوان: | Comparative study of two types electro-thermally actuated micromirrors on silicon substrate |
|---|---|
| المؤلفون: | Comanescu, F., Tibeica, C., Purica, M., Schiopu, P. |
| المصدر: | CAS 2011 Proceedings (2011 International Semiconductor Conference) Semiconductor Conference (CAS), 2011 International. 1:91-94 Oct, 2011 |
| Relation: | 2011 International Semiconductor Conference (CAS 2011) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
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