Design and experimental verifications of an integrated micro-gyroscope

التفاصيل البيبلوغرافية
العنوان: Design and experimental verifications of an integrated micro-gyroscope
المؤلفون: Chiu, Sheng-Ren, Sue, Chung-Yang, Lin, Shih-Ting, Lin, Shih-Chieh, Hsu, Yu-Wen, Su, Yan-Kuin
المصدر: 2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT) Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT), 2011 6th International. :319-322 Oct, 2011
Relation: 2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781457713880
9781457713873
9781457713897
تدمد:21505934
21505942
DOI:10.1109/IMPACT.2011.6117259