A Shallow-'ikench Isolation Study For 0.18pm Cmos Technology With Emphasis On The Effects Of Well Design, Channel-stop Implants, Trenchl Depth, And Salicide Process

التفاصيل البيبلوغرافية
العنوان: A Shallow-'ikench Isolation Study For 0.18pm Cmos Technology With Emphasis On The Effects Of Well Design, Channel-stop Implants, Trenchl Depth, And Salicide Process
المؤلفون: Murtaza, S.S., Chatterjee, A., Mei, P., Amerasekera, A., Nicollian, P., Kittl, J., Breedijk, T., Hanratty, M., Nag, S., Ali, I., Rogers, D., Chen, I.-C.
المصدر: Proceedings of Technical Papers. International Symposium on VLSI Technology, Systems, and Applications VLSI Technology, Systems, and Applications, 1997. Proceedings of Technical Papers. 1997 International Symposium on. :133-137 1997
Relation: International Symposium on VLSI Technology, Systems, and Applications
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780341317
9780780341319
تدمد:1524766X
DOI:10.1109/VTSA.1997.614744