Precise comparison of two-dimensional dopant profiles measured by electron holography and scanning capacitance microscopy

التفاصيل البيبلوغرافية
العنوان: Precise comparison of two-dimensional dopant profiles measured by electron holography and scanning capacitance microscopy
المؤلفون: Yang, Jun-Mo, Shaislamov, Ulugbek, Hyun, Moon Seop, Yoo, Jung Ho, Kim, Jeoung Woo, Noh-Yeal Kwak, Kim, Won, Park, Joong Keun
المصدر: 2011 IEEE Nanotechnology Materials and Devices Conference Nanotechnology Materials and Devices Conference (NMDC), 2011 IEEE. :240-243 Oct, 2011
Relation: 2011 IEEE Nanotechnology Materials and Devices Conference (NMDC)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781457721397
9781457721403
9781457721410
DOI:10.1109/NMDC.2011.6155352