مؤتمر
Precise comparison of two-dimensional dopant profiles measured by electron holography and scanning capacitance microscopy
العنوان: | Precise comparison of two-dimensional dopant profiles measured by electron holography and scanning capacitance microscopy |
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المؤلفون: | Yang, Jun-Mo, Shaislamov, Ulugbek, Hyun, Moon Seop, Yoo, Jung Ho, Kim, Jeoung Woo, Noh-Yeal Kwak, Kim, Won, Park, Joong Keun |
المصدر: | 2011 IEEE Nanotechnology Materials and Devices Conference Nanotechnology Materials and Devices Conference (NMDC), 2011 IEEE. :240-243 Oct, 2011 |
Relation: | 2011 IEEE Nanotechnology Materials and Devices Conference (NMDC) |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9781457721397 9781457721403 9781457721410 |
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DOI: | 10.1109/NMDC.2011.6155352 |