مؤتمر
A pneumatic neural probe structure fabricated by parylene thermal bonding technique
| العنوان: | A pneumatic neural probe structure fabricated by parylene thermal bonding technique |
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| المؤلفون: | Yen, Yu-Chang, Lee, Yu-Tao, Chang, Yen-Chung, Fang, Weileun |
| المصدر: | 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on. :381-384 Jan, 2012 |
| Relation: | 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781467303248 9781467303255 |
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| تدمد: | 10846999 |
| DOI: | 10.1109/MEMSYS.2012.6170213 |