دورية أكاديمية
Micromachined semi-encapsulated spiral inductors for microelectromechanical systems (MEMS) applications
العنوان: | Micromachined semi-encapsulated spiral inductors for microelectromechanical systems (MEMS) applications |
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المؤلفون: | Sadler, D.J., Wenjin Zhang, Chong H. Ahn, Hi Jung Kim, Suk Hee Han |
المصدر: | IEEE Transactions on Magnetics IEEE Trans. Magn. Magnetics, IEEE Transactions on. 33(5):3319-3321 Sep, 1997 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 00189464 19410069 |
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DOI: | 10.1109/20.617930 |