مؤتمر
Novel fabrication process for transverse and longitudinal mode PZT actuators
| العنوان: | Novel fabrication process for transverse and longitudinal mode PZT actuators |
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| المؤلفون: | Misri, Isaac, Hareesh, Prakruthi, Yang, Shuang, DeVoe, Don L. |
| المصدر: | 2012 Microsystems for Measurement and Instrumentation (MAMNA) Microsystems for Measurement and Instrumentation (MAMNA), 2012. :1-5 Mar, 2012 |
| Relation: | 2012 Microsystems for Measurement and Instrumentation (MAMNA) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781467317818 9781467317825 9781467317832 |
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| DOI: | 10.1109/MAMNA.2012.6195097 |