مؤتمر
Numerical simulation of heat generation during the back grinding process of silicon wafers
| العنوان: | Numerical simulation of heat generation during the back grinding process of silicon wafers |
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| المؤلفون: | Abdelnaby, A. H., Potirniche, G. P., Elshabini, A., Barlow, F., Groothuis, S. K., Parker, R. S. |
| المصدر: | 2012 IEEE Workshop on Microelectronics and Electron Devices Microelectronics and Electron Devices (WMED), 2012 IEEE Workshop on. :1-4 Apr, 2012 |
| Relation: | 2012 IEEE Workshop on Microelectronics and Electron Devices (WMED) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781457717352 9781457717376 9781457717383 |
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| تدمد: | 19473834 19473842 |
| DOI: | 10.1109/WMED.2012.6202614 |