التفاصيل البيبلوغرافية
| العنوان: |
Cleaning after silicon oxide CMP |
| المؤلفون: |
Tardif, F., Mansart, I., Lardin, T., Demolliens, O., Fayolle, M., Gobile, Y., Palleau, J., Torres, J. |
| المصدر: |
European Workshop Materials for Advanced Metallization, Materials for advanced metallization Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop. :74-77 1997 |
| Relation: |
European Workshop Materials for Advanced Metallization. MAM'97 Abstracts Booklet |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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