Metal etcher characterization using flash memory cells as charge sensors

التفاصيل البيبلوغرافية
العنوان: Metal etcher characterization using flash memory cells as charge sensors
المؤلفون: Alba, S., Colognese, A., Ghio, E.
المصدر: European Workshop Materials for Advanced Metallization, Materials for advanced metallization Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop. :146-147 1997
Relation: European Workshop Materials for Advanced Metallization. MAM'97 Abstracts Booklet
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
تدمد:12660167
DOI:10.1109/MAM.1997.621095