مؤتمر
Metal etcher characterization using flash memory cells as charge sensors
العنوان: | Metal etcher characterization using flash memory cells as charge sensors |
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المؤلفون: | Alba, S., Colognese, A., Ghio, E. |
المصدر: | European Workshop Materials for Advanced Metallization, Materials for advanced metallization Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop. :146-147 1997 |
Relation: | European Workshop Materials for Advanced Metallization. MAM'97 Abstracts Booklet |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 12660167 |
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DOI: | 10.1109/MAM.1997.621095 |