Epitaxial CoSi2 formation by Co/Hf bilayers on Si(100)

التفاصيل البيبلوغرافية
العنوان: Epitaxial CoSi2 formation by Co/Hf bilayers on Si(100)
المؤلفون: Gebhardt, B., Falke, M., Giesler, H., Teichert, S., Beddies, G., Hinneberg, H.J.
المصدر: European Workshop Materials for Advanced Metallization, Materials for advanced metallization Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop. :184-184 1997
Relation: European Workshop Materials for Advanced Metallization. MAM'97 Abstracts Booklet
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
تدمد:12660167
DOI:10.1109/MAM.1997.621113