Self-aligned contact metallization for III–V channel Field-Effect Transistors

التفاصيل البيبلوغرافية
العنوان: Self-aligned contact metallization for III–V channel Field-Effect Transistors
المؤلفون: Yeo, Yee-Chia, Zhang, Xingui, Guo, Hua Xin, Subramanian, Sujith, Gong, Xiao, Eugene, Ivana, Kong, Yu-Jin, Zhu, Zhu
المصدر: 2012 12th International Workshop on Junction Technology Junction Technology (IWJT), 2012 12th International Workshop on. :192-197 May, 2012
Relation: 2012 12th International Workshop on Junction Technology (IWJT)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781467312561
9781467312585
9781467312578
DOI:10.1109/IWJT.2012.6212839