مؤتمر
High speed replication of sub-micron features on large areas by X-ray lithography
| العنوان: | High speed replication of sub-micron features on large areas by X-ray lithography |
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| المؤلفون: | Maydan, D., Coquin, G. A., Maldonado, J. R., Somekh, S., Lou, D. Y., Taylor, G. N. |
| المصدر: | 1974 International Electron Devices Meeting (IEDM) IEDM Tech. Dig. Electron Devices Meeting (IEDM), 1974 International. :18-20 Dec, 1974 |
| Relation: | 1974 International Electron Devices Meeting (IEDM) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 01631918 |
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| DOI: | 10.1109/IEDM.1974.6219622 |