Chemical reaction thermodynamic model of Low Pressure CVD for Nano-TiO2 film preparation

التفاصيل البيبلوغرافية
العنوان: Chemical reaction thermodynamic model of Low Pressure CVD for Nano-TiO2 film preparation
المؤلفون: Li, Tao, Yang, Junfeng, Zhang, Hong-Chao, Yuan, Chris
المصدر: 2012 IEEE International Symposium on Sustainable Systems and Technology (ISSST) Sustainable Systems and Technology (ISSST), 2012 IEEE International Symposium on. :1-6 May, 2012
Relation: 2012 IEEE International Symposium on Sustainable Systems and Technology (ISSST)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781467320030
9781467320023
9781467320047
تدمد:10952020
23787260
2157524X
DOI:10.1109/ISSST.2012.6228023