دورية أكاديمية
Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications
| العنوان: | Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications |
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| المؤلفون: | Marxer, C., Thio, C., Gretillat, M.-A., de Rooij, N.F., Battig, R., Anthamatten, O., Valk, B., Vogel, P. |
| المصدر: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 6(3):277-285 Sep, 1997 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 10577157 19410158 |
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| DOI: | 10.1109/84.623118 |