مؤتمر
Copper Integration In Self Aligned Dual Damascene Architecture
| العنوان: | Copper Integration In Self Aligned Dual Damascene Architecture |
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| المؤلفون: | Morand, Y., Lerme, M., Palleau, J., Torres, J., Vinet, F., Demolliens, O., Ulmer, L., Gobil, Y., Fayolle, M., Romagna, F., Le Bihan, R. |
| المصدر: | 1997 Symposium on VLSI Technology VLSI Technology, 1997. Digest of Technical Papers., 1997 Symposium on. :31-32 1997 |
| Relation: | 1997 Symposium on VLSI Technology |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 4930813751 9784930813756 |
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| DOI: | 10.1109/VLSIT.1997.623680 |