Effects of gate process on NBTI characteristics of TiN gate FinFET

التفاصيل البيبلوغرافية
العنوان: Effects of gate process on NBTI characteristics of TiN gate FinFET
المؤلفون: Kim, Jin Ju, Moonju Cho, Pantisano, Luigi, Chiarella, Thomas, Togo, Mitsuhiro, Horiguchi, Naoto, Groeseneken, Guido, Lee, Byoung Hun
المصدر: 2012 IEEE International Reliability Physics Symposium (IRPS) Reliability Physics Symposium (IRPS), 2012 IEEE International. :GD.6.1-GD.6.4 Apr, 2012
Relation: 2012 IEEE International Reliability Physics Symposium (IRPS)
قاعدة البيانات: IEEE Xplore Digital Library