High performance Ω-gate Ge FinFET featuring low temperature Si2H6 passivation and implantless Schottky-barrier NiGe metallic Source/Drain

التفاصيل البيبلوغرافية
العنوان: High performance Ω-gate Ge FinFET featuring low temperature Si2H6 passivation and implantless Schottky-barrier NiGe metallic Source/Drain
المؤلفون: Liu, Bin, Gong, Xiao, Han, Genquan, Lim, Phyllis Shi Ya, Tong, Yi, Zhou, Qian, Yang, Yue, Daval, Nicolas, Pulido, Matthieu, Delprat, Daniel, Nguyen, Bich-Yen, Yeo, Yee-Chia
المصدر: 2012 IEEE Silicon Nanoelectronics Workshop (SNW) Silicon Nanoelectronics Workshop (SNW), 2012 IEEE. :1-2 Jun, 2012
Relation: 2012 IEEE Silicon Nanoelectronics Workshop (SNW)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781467309950
9781467309967
9781467309974
تدمد:21614636
21614644
DOI:10.1109/SNW.2012.6243323