دورية أكاديمية
Inductively Coupled Plasma Etching of Complementary Barrier Infrared Detector Focal Plane Arrays for Long-Wave Infrared Imaging
| العنوان: | Inductively Coupled Plasma Etching of Complementary Barrier Infrared Detector Focal Plane Arrays for Long-Wave Infrared Imaging |
|---|---|
| المؤلفون: | Nguyen, J., Soibel, A., Rafol, S. B., Khoskhlagh, A., Liu, J. K., Mumolo, J. M., Hoeglund, L., Keo, S. A., Ting, D. Z.-Y., Gunapala, S. D. |
| المصدر: | IEEE Photonics Technology Letters IEEE Photon. Technol. Lett. Photonics Technology Letters, IEEE. 24(18):1581-1583 Sep, 2012 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 10411135 19410174 |
|---|---|
| DOI: | 10.1109/LPT.2012.2208949 |