مؤتمر
Closed-loop phase control of an 8×8 MEMS mirror array via in-situ interferometry
العنوان: | Closed-loop phase control of an 8×8 MEMS mirror array via in-situ interferometry |
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المؤلفون: | Chan, Trevor, Megens, Mischa, Yoo, Byung-Wook, Chang-Hasnain, Connie, Wu, Ming, Horsley, David |
المصدر: | 2012 International Conference on Optical MEMS and Nanophotonics Optical MEMS and Nanophotonics (OMN), 2012 International Conference on. :146-147 Aug, 2012 |
Relation: | 2012 IEEE Photonics Society International Conference on Optical MEMS and Nanophotonics |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9781457715112 9781457715129 9781457715136 |
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تدمد: | 21605033 21605041 |
DOI: | 10.1109/OMEMS.2012.6318845 |