Closed-loop phase control of an 8×8 MEMS mirror array via in-situ interferometry

التفاصيل البيبلوغرافية
العنوان: Closed-loop phase control of an 8×8 MEMS mirror array via in-situ interferometry
المؤلفون: Chan, Trevor, Megens, Mischa, Yoo, Byung-Wook, Chang-Hasnain, Connie, Wu, Ming, Horsley, David
المصدر: 2012 International Conference on Optical MEMS and Nanophotonics Optical MEMS and Nanophotonics (OMN), 2012 International Conference on. :146-147 Aug, 2012
Relation: 2012 IEEE Photonics Society International Conference on Optical MEMS and Nanophotonics
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781457715112
9781457715129
9781457715136
تدمد:21605033
21605041
DOI:10.1109/OMEMS.2012.6318845