مؤتمر
PZT micromirror with integrated piezoresistive position sensors
| العنوان: | PZT micromirror with integrated piezoresistive position sensors |
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| المؤلفون: | Bakke, Thor, Johansen, Ib-Rune |
| المصدر: | 2012 International Conference on Optical MEMS and Nanophotonics Optical MEMS and Nanophotonics (OMN), 2012 International Conference on. :192-193 Aug, 2012 |
| Relation: | 2012 IEEE Photonics Society International Conference on Optical MEMS and Nanophotonics |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781457715112 9781457715129 9781457715136 |
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| تدمد: | 21605033 21605041 |
| DOI: | 10.1109/OMEMS.2012.6318868 |