Multi-layered poly-dimethylsiloxane as a non-hermetic packaging material for medical MEMS

التفاصيل البيبلوغرافية
العنوان: Multi-layered poly-dimethylsiloxane as a non-hermetic packaging material for medical MEMS
المؤلفون: Lachhman, S., Zorman, C.A., Ko, W.H.
المصدر: 2012 Annual International Conference of the IEEE Engineering in Medicine and Biology Society Engineering in Medicine and Biology Society (EMBC), 2012 Annual International Conference of the IEEE. :1655-1658 Aug, 2012
Relation: 2012 34th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781424441198
9781457717871
تدمد:1557170X
1094687X
15584615
DOI:10.1109/EMBC.2012.6346264