مؤتمر
Power MEMS and microengines
| العنوان: | Power MEMS and microengines |
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| المؤلفون: | Epstein, A.H., Senturia, S.D., Anathasuresh, G., Ayon, A., Breuer, K., Chen, K.-S., Ehrich, F., Gauba, G., Ghodssi, R., Groshenry, C., Jacobson, S., Lang, J., Mehra, C.-C., Mur Miranda, J., Nagle, S., Orr, D., Piekos, E., Schmidt, M., Shirley, G., Spearing, S., Tan, C., Tzeng, Y.-S., Waitz, I. |
| المصدر: | Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) Solid-state sensors and actuators Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on. 2:753-756 vol.2 1997 |
| Relation: | Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780338294 9780780338296 |
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| DOI: | 10.1109/SENSOR.1997.635209 |