مؤتمر
Integrable active microvalve with surface micromachined curled-up actuator
العنوان: | Integrable active microvalve with surface micromachined curled-up actuator |
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المؤلفون: | Haji-Babaei, J., Kwok, C.Y., Huang, R.S. |
المصدر: | Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) Solid-state sensors and actuators Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on. 2:833-836 vol.2 1997 |
Relation: | Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 0780338294 9780780338296 |
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DOI: | 10.1109/SENSOR.1997.635230 |