Integrable active microvalve with surface micromachined curled-up actuator

التفاصيل البيبلوغرافية
العنوان: Integrable active microvalve with surface micromachined curled-up actuator
المؤلفون: Haji-Babaei, J., Kwok, C.Y., Huang, R.S.
المصدر: Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) Solid-state sensors and actuators Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on. 2:833-836 vol.2 1997
Relation: Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780338294
9780780338296
DOI:10.1109/SENSOR.1997.635230