مؤتمر
Fully integrated thermally actuated SOI diaphragm: Design, fabrication & characterization
| العنوان: | Fully integrated thermally actuated SOI diaphragm: Design, fabrication & characterization |
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| المؤلفون: | Lefevre, R., Salette, A., Montes, L., Morfouli, P., Dehan, C. |
| المصدر: | 2012 International Semiconductor Conference Dresden-Grenoble (ISCDG) Semiconductor Conference Dresden-Grenoble (ISCDG), 2012 International. :195-198 Sep, 2012 |
| Relation: | 2012 International Semiconductor Conference Dresden-Grenoble (ISCDG) - formerly known as the Semiconductor Conference Dresden (SCD) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781467317153 9781467317177 |
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| DOI: | 10.1109/ISCDG.2012.6360021 |