دورية أكاديمية
Solid state: Superfast annealing: Application of laser and electron-beam annealing portends three-dimensional ICs and economical photoelectric cells
العنوان: | Solid state: Superfast annealing: Application of laser and electron-beam annealing portends three-dimensional ICs and economical photoelectric cells |
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المؤلفون: | Brown, Walter L. |
المصدر: | IEEE Spectrum IEEE Spectr. Spectrum, IEEE. 18(4):50-56 Apr, 1981 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 00189235 19399340 |
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DOI: | 10.1109/MSPEC.1981.6369479 |