مؤتمر
Membrane sieve using stoichiometric and stress-reduced SiN/SiO/SiN multilayer films and applications to plasma separation
| العنوان: | Membrane sieve using stoichiometric and stress-reduced SiN/SiO/SiN multilayer films and applications to plasma separation |
|---|---|
| المؤلفون: | Lee, Dae-Sik, Choi, Yo Han, Jun, Mun Yeon, Han, Yong Duk, Yoon, Hyun C., Shoji, Shuichi |
| المصدر: | 2012 IEEE Sensors Sensors, 2012 IEEE. :1-4 Oct, 2012 |
| Relation: | 2012 IEEE Sensors |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781457717659 9781457717666 9781457717673 |
|---|---|
| تدمد: | 19300395 |
| DOI: | 10.1109/ICSENS.2012.6411404 |