مؤتمر
Sub-10 nanometer uncooled platinum bolometers via plasma enhanced atomic layer deposition
| العنوان: | Sub-10 nanometer uncooled platinum bolometers via plasma enhanced atomic layer deposition |
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| المؤلفون: | Purkl, Fabian, English, Tim, Yama, Gary, Provine, J, Samarao, Ashwin K., Feyh, Ando, O'Brien, Gary, Ambacher, Oliver, Howe, Roger T., Kenny, Thomas W. |
| المصدر: | 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on. :185-188 Jan, 2013 |
| Relation: | 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781467356541 9781467356558 |
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| تدمد: | 10846999 |
| DOI: | 10.1109/MEMSYS.2013.6474208 |