مؤتمر
Process control monitors for single-walled carbon nanotube based sensor fabrication processes
| العنوان: | Process control monitors for single-walled carbon nanotube based sensor fabrication processes |
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| المؤلفون: | Chikkadi, K., Roman, C., Hierold, C. |
| المصدر: | 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on. :275-278 Jan, 2013 |
| Relation: | 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781467356541 9781467356558 |
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| تدمد: | 10846999 |
| DOI: | 10.1109/MEMSYS.2013.6474231 |