DC and AC electrothermal charicterization of heated microcantilevers using scanning thermoreflectance microscopy

التفاصيل البيبلوغرافية
العنوان: DC and AC electrothermal charicterization of heated microcantilevers using scanning thermoreflectance microscopy
المؤلفون: Kim, Joohyun, Han, Sunwoo, Park, Keunhan, Lee, Bong-Jae, King, William P., Lee, Jungchul
المصدر: 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on. :409-412 Jan, 2013
Relation: 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781467356541
9781467356558
تدمد:10846999
DOI:10.1109/MEMSYS.2013.6474265