مؤتمر
Epitaxially-encapsulated polysilicon disk resonator gyroscope
| العنوان: | Epitaxially-encapsulated polysilicon disk resonator gyroscope |
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| المؤلفون: | Nitzan, S., Ahn, C. H., Su, T.-H., Li, M., Ng, E. J., Wang, S., Yang, Z. M., O'Brien, G., Boser, B. E., Kenny, T. W., Horsley, D. A. |
| المصدر: | 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on. :625-628 Jan, 2013 |
| Relation: | 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781467356541 9781467356558 |
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| تدمد: | 10846999 |
| DOI: | 10.1109/MEMSYS.2013.6474319 |