Si-homoepitaxy by electron cyclotron resonance CVD

التفاصيل البيبلوغرافية
العنوان: Si-homoepitaxy by electron cyclotron resonance CVD
المؤلفون: Conrad, E., Elstner, L., Fuhs, W., Henrion, W., Muller, P., Selle, B., Zeimer, U.
المصدر: Conference Record of the Twenty Sixth IEEE Photovoltaic Specialists Conference - 1997 Photovoltaic specialists conference Photovoltaic Specialists Conference, 1997., Conference Record of the Twenty-Sixth IEEE. :755-758 1997
Relation: Conference Record of the Twenty Sixth IEEE Photovoltaic Specialists Conference - 1997
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780337670
9780780337671
تدمد:01608371
DOI:10.1109/PVSC.1997.654199