مؤتمر
Si-homoepitaxy by electron cyclotron resonance CVD
العنوان: | Si-homoepitaxy by electron cyclotron resonance CVD |
---|---|
المؤلفون: | Conrad, E., Elstner, L., Fuhs, W., Henrion, W., Muller, P., Selle, B., Zeimer, U. |
المصدر: | Conference Record of the Twenty Sixth IEEE Photovoltaic Specialists Conference - 1997 Photovoltaic specialists conference Photovoltaic Specialists Conference, 1997., Conference Record of the Twenty-Sixth IEEE. :755-758 1997 |
Relation: | Conference Record of the Twenty Sixth IEEE Photovoltaic Specialists Conference - 1997 |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 0780337670 9780780337671 |
---|---|
تدمد: | 01608371 |
DOI: | 10.1109/PVSC.1997.654199 |