Thermo mechanical challenges for processing and packaging stacked ultrathin wafers

التفاصيل البيبلوغرافية
العنوان: Thermo mechanical challenges for processing and packaging stacked ultrathin wafers
المؤلفون: Gonzalez, Mario, Vandevelde, Bart, Manna, Antonio La, Swinnen, Bart, Beyne, Eric
المصدر: 2013 IEEE 63rd Electronic Components and Technology Conference Electronic Components and Technology Conference (ECTC), 2013 IEEE 63rd. :7-12 May, 2013
Relation: 2013 IEEE 63rd Electronic Components and Technology Conference (ECTC)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781479902330
9781479902323
تدمد:05695503
23775726
DOI:10.1109/ECTC.2013.6575543