مؤتمر
Design and fabrication of a novel integrated floating-electrode-"electret"-microphone (FFEM)
| العنوان: | Design and fabrication of a novel integrated floating-electrode-"electret"-microphone (FFEM) |
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| المؤلفون: | Zou, Q.B., Tan, Z.M., Wang, Z.F., Lim, M.K., Lin, R.M., Yi, S., Li, Z.J. |
| المصدر: | Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Micro electro mechanical systems Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on. :586-590 1998 |
| Relation: | Proceedings IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 078034412X 9780780344129 |
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| تدمد: | 10846999 |
| DOI: | 10.1109/MEMSYS.1998.659823 |