مؤتمر
Area minimization of a three-axis separate mass capacitive accelerometer using the ThELMA process
| العنوان: | Area minimization of a three-axis separate mass capacitive accelerometer using the ThELMA process |
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| المؤلفون: | Briffa, Ansel, Gatt, Edward, Micallef, Joseph, Grech, Ivan, Casha, Owen, Darmanin, Jean Marie |
| المصدر: | Eurocon 2013 EUROCON, 2013 IEEE. :2094-2099 Jul, 2013 |
| Relation: | IEEE EUROCON 2013 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781467322300 9781467322324 |
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| DOI: | 10.1109/EUROCON.2013.6625269 |