مؤتمر
Ultra-high aspect ratio trenches in single crystal silicon with epitaxial gap tuning
| العنوان: | Ultra-high aspect ratio trenches in single crystal silicon with epitaxial gap tuning |
|---|---|
| المؤلفون: | Ng, E. J., Chiang, C.-F., Yang, Y., Hong, V. A., Ahn, C. H., Kenny, T. W. |
| المصدر: | 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on. :182-185 Jun, 2013 |
| Relation: | 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781467359832 |
|---|---|
| تدمد: | 2159547X 21641641 |
| DOI: | 10.1109/Transducers.2013.6626732 |