مؤتمر
Effect of surface morphology and crystal orientations on fracture strength of thin film (110) single crystal silicon
| العنوان: | Effect of surface morphology and crystal orientations on fracture strength of thin film (110) single crystal silicon |
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| المؤلفون: | Uesugi, A., Hirai, Y., Sugano, K., Tsuchiya, T., Tabata, O. |
| المصدر: | 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), 2013 Transducers & Eurosensors XXVII: The 17th International Conference on. :1946-1949 Jun, 2013 |
| Relation: | 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781467359832 |
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| تدمد: | 2159547X 21641641 |
| DOI: | 10.1109/Transducers.2013.6627175 |