Identification and verification of BEOL metal fails due to ESD stress using current density analysis tool

التفاصيل البيبلوغرافية
العنوان:	Identification and verification of BEOL metal fails due to ESD stress using current density analysis tool
المؤلفون:	Mitra, Souvick, Palmer, Nicholas, Muhammad, Mujahid, Gauthier, Robert, Halbach, Ralph, Seguin, Chris
المصدر:	2013 35th Electrical Overstress/Electrostatic Discharge Symposium Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2013 35th. :1-6 Sep, 2013
Relation:	2013 35th Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD)
قاعدة البيانات:	IEEE Xplore Digital Library

الوصف
ردمك:	9781585372324
تدمد:	07395159